In our quest to continue Moore’s low into the next decade, new manufacturing technologies are being adopted for our lithographic machines. One of such technologies is Additive Manufacturing that opens the opportunity to produce parts that are directly contributing to the performance our machines. More than 100 different machine parts are in volume production by additive manufacturing of metal, plastics and ceramics. The main focus of the lecture is to show the ways in which Additive Manufacturing is helping increase the performance of ASML machines with examples of actual parts used in production. The additive manufacturing technologies used within ASML are presented.
- Zaal 1 - RapidPro
- Lezing in het Engels